Gas phase and surface kinetics in plasma and hot filament-enhanced catalytic chemical vapor deposition of carbon nanostructures
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منابع مشابه
Synthesis of Carbon Nanotubes by Plasma Enhanced Hot-Filament C
A mixture of acetylene, hydrogen and ammonia C2H2/H2/NH3 is used to produce carbon nanotubes (CNTs) by a plasma-enhanced catalytic chemical vapor deposition process with hot-filaments assistance (PE HF CCVD). The investigation of gas phase and surface chemistry is performed by CHEMKINTM software. The concentration of gas phase species on the substrate is presented. Based on this study the role ...
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